Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures
نویسندگان
چکیده
منابع مشابه
High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator
Beijing Research Institute of Telemetry, Beijing 100000, China; [email protected] (C.Z.); [email protected] (D.X.H.); [email protected] (X.F.J.); [email protected] (S.M.Z.); [email protected] (J.B.Z.); [email protected] (M.M.W.); [email protected] (W.B.L.); [email protected] (Y.B.G.) * Correspondence: [email protected]; Tel.: +86-10-6819-8271 † Presented at the Eurosensors 2017 Conference, Paris, ...
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ژورنال
عنوان ژورنال: Materials Research Letters
سال: 2020
ISSN: 2166-3831
DOI: 10.1080/21663831.2020.1734680